Compact Traversing Robot

ABSTRACT

An apparatus includes a spindle platform; a traversing platform configured to move in a first direction; a lift system connected to the spindle platform and the traversing platform, the lift system configured to move the spindle platform in a second direction perpendicular to the first direction; a movable arm connected to the spindle platform, the movable arm including a first link connected to the spindle platform, a second link connected to the first link, and a third link connected to the second link, and a first actuator connected to the spindle platform and configured to cause a rotation of the first link, and a second actuator in the movable arm and configured to cause a rotation of the second link. The first actuator extends from the spindle platform into the first link to occupy a combined thickness of the spindle platform and the first link.

CROSS REFERENCE TO RELATED APPLICATION

This application claims priority under 35 USC 119(e) to U.S. ProvisionalApplication No. 62/983,846, filed Mar. 2, 2020, the content of which ishereby incorporated by reference in its entirety.

BACKGROUND Technical Field

The example and non-limiting embodiments described herein relategenerally to a vertically compact traversing robot that can be utilizedin material-handling vacuum-environment systems and other applications.

Brief Description of the Prior Developments

A material-handling robot includes a robot arm coupled to a drive unit,the robot being translatable along a track or rail system. The robot armmay include an upper link, a lower link on the upper link, and anend-effector on the lower link, the end-effector being configured toaccommodate a payload in a material-handling operation. The drive unitincludes a spindle assembly coupled to the robot arm, a Z-axis mechanismfor moving the spindle assembly up and down in a Z direction(vertically), and one or more coaxially stacked motors. The robot arm islocatable and operable in a vacuum environment, and the drive unit islocatable in an atmospheric environment. A bellows may be used tocontain the vacuum environment in the space where the robot armoperates. The spindle assembly, the Z-axis mechanism for the verticalmovement of the spindle assembly, and/or the coaxially stacking of themotors generally requires a substantial depth and volume of the vacuumchamber where the robot operates.

SUMMARY

In accordance with one aspect, an apparatus comprises a spindleplatform; a traversing platform configured to move in a first direction;a lift system connected to the spindle platform and the traversingplatform, the lift system being configured to move the spindle platformin a second direction between a collapsed position and an extendedposition, the second direction being perpendicular to the firstdirection; at least one movable arm connected to the spindle platform,the at least one movable arm comprising a first link connected to thespindle platform, a second link connected to the first link, and a thirdlink connected to the second link, and at least one first actuatorconnected to the spindle platform and being configured to cause arotation of the first link, and at least one second actuator in the atleast one movable arm and being configured to cause a rotation of thesecond link. The first actuator extends from the spindle platform intothe first link to occupy a combined thickness of the spindle platformand the first link.

In accordance with another aspect, a method comprises providing atraversing platform configured to move in a first direction; providing aspindle platform; providing a lift system connected to the spindleplatform and the traversing platform, the lift system being configuredto move the spindle platform in a second direction between a collapsedposition and an extended position, the second direction beingperpendicular to the first direction; and providing at least one movablearm connected to the spindle platform, the at least one movable armcomprising a first link connected to the spindle platform, a second linkconnected to the first link, and a third link connected to the secondlink; providing at least one first actuator connected to the spindleplatform and being configured to cause a rotation of the first link, andproviding at least one second actuator in the at least one movable armand being configured to cause a rotation of the second link. The firstactuator extends from the spindle platform into the first link to occupya combined thickness of the spindle platform and the first link.

In accordance with another aspect, an apparatus comprises at least oneprocessor; and at least one non-transitory memory including computerprogram code, the at least one memory and the computer program codeconfigured to, with the at least one processor, cause the apparatus atleast to perform: moving a traversing platform in a first direction;operating a lift system connected to the traversing platform and to aspindle platform to move the spindle platform in a second directionbetween a collapsed position and an extended position, the seconddirection being perpendicular to the first direction; operating at leastone movable arm connected to the spindle platform, the at least onemovable arm comprising a first link connected to the spindle platform, asecond link connected to the first link, and a third link connected tothe second link; and operating at least one first actuator meansconnected to the spindle platform and being configured to cause arotation of the first link, and at least one second actuator means inthe at least one movable arm and being configured to cause a rotation ofthe second link. The first actuator means extends from the spindleplatform into the first link to occupy a combined thickness of thespindle platform and the first link.

In accordance with another aspect, an apparatus comprises a traversingplatform configured to move in a first direction; a spindle platformhaving a first actuator and a first control connected to the firstactuator; at least one movable arm connected to the spindle platform,the at least one movable arm comprising a first link connected to thefirst actuator and at least one second link connected to the first link,the second link comprising at least one second actuator and controlledby a second control on the at least one movable arm, the at least onefirst actuator being configured to cause a rotation of the first linkand the at least one second actuator being configured to cause arotation of the second link; a lift system connected to the spindleplatform and the traversing platform, the lift system being configuredto move the spindle platform in a second direction between a collapsedposition and an extended position, the second direction beingperpendicular to the first direction, the lift system having a thirdactuator on the traversing platform and a third control connected to thethird actuator. The first actuator extends from the spindle platforminto the first link to occupy a combined thickness of the spindleplatform and the first link.

BRIEF DESCRIPTION OF THE DRAWINGS

The foregoing aspects and other features are explained in the followingdescription, taken in connection with the accompanying drawings,wherein:

FIGS. 0A-0C are schematic representations of various views of astate-of-the art vacuum-environment material-handling traversing robot;

FIG. 1A is a schematic representation of a traversing robot having acontroller;

FIGS. 1B(1)-1B(3) are schematic representations of various views of therobot of FIG. 1A;

FIGS. 1C(1) and 1C(2) are schematic representations showing internalcomponents of the robot of FIG. 1A;

FIGS. 2A-2D are schematic representations of a traversing robot showinglocations of controllers relative to motors of a traversing robot;

FIGS. 3A and 3B are schematic representations of connections of internalvolumes of components in a robot;

FIGS. 4A(1)-4A(3) and 4B(1)-4B(3) are schematic representations of arobot in various positions with respect to a spindle platform and armsof the robot;

FIGS. 5A and 5B are schematic representations of a robot showing overlapof components when the spindle platform is lowered;

FIG. 6 is a schematic representation of an alternative exampleembodiment of a robot having a counterbalancing feature;

FIGS. 7A-7C are schematic representations of alternative exampleembodiments of lift mechanisms for robots;

FIGS. 7D(1) and 7D(2) are schematic representations of an example robotin which the spindle platform is supported by linear bearings and isactuated by a ball-screw drive;

FIG. 7E is a schematic representation of an example robot in which anactuating motor is located in an arm of the robot;

FIGS. 7F(1) and 7F(2) are schematic representations of an example robothaving no lift mechanism;

FIGS. 7G(1)-7G(4) are schematic representations of example robotsillustrating comparisons of structures; and

FIG. 8 is a schematic representation of a robot arm having an upper armand two forearms.

DETAILED DESCRIPTION OF EMBODIMENT

Although the features will be described with reference to the exampleembodiments shown in the drawings, it should be understood that featurescan be embodied in many alternate forms of embodiments. In addition, anysuitable size, shape, or type of elements or materials could be used.

Referring to FIG. 0A-0C, one example of a state-of-the-artvacuum-environment material-handling traversing robot is shown generallyat 10 and is hereinafter referred to as “robot 10.” Robot 10 comprises arobot arm 12 coupled to a drive unit 14, the robot arm 12 beinglocatable and operable in a vacuum environment and the drive unit 14being locatable in an atmospheric environment. As shown, the robot arm12 comprises an upper link 16, two lower links 18, and two end-effectors20, one on each of the lower links 18. The drive unit 14 comprises aspindle assembly 24 coupled to the robot arm 12, a Z-axis mechanism 26(such as a ball screw) for moving the spindle assembly 24 up and downthereby providing vertical actuation of the robot arm 12 in the Zdirection, and one or more coaxially stacked motors 28. A bellows 30 maybe used to contain the vacuum environment in the space where the robotarm 12 operates. The robot 10 may translate along a track 34 or rails inthe X direction (shown at arrows X in FIG. 0A). The robot 10 maytranslate along two tracks 34 or rails, as shown in FIG. 0B. In aretracted position, the top end-effector 20 may occlude the lowerend-effector 20, as shown in FIG. 0C.

One objective of the present invention is to reduce the vertical spaceoccupied by a robot and, consequently, reduce the depth and volume ofthe vacuum chamber where the robot operates.

An example embodiment of a traversing robot according to the presentinvention is depicted diagrammatically in FIG. 1A-1C(2) and ishereinafter referred to as “robot 100.” FIG. 1A is a side view of therobot 100 with a control system 106. Additional views of the robot 100are provided in FIGS. 1B(1)-1B(3), and an example arrangement of theinternal components of the robot 100 is depicted diagrammatically inFIGS. 1C(1) and 1C(2).

As shown in FIG. 1A, the robot 100 may be supported by a stationary base108 and may comprise a linear guidance and actuation system 110, atraversing platform 112, a lift mechanism 114, a spindle platform 116, arobot arm 120, and the control system 106.

The stationary base 108 may be a structure configured to support therobot 100. As an example, the stationary base 108 may be a plate or aframe extended along the direction of traversing motion (for example, inthe X direction along an X-axis) of the robot 100, a floor or a wall ofa vacuum chamber, or any other suitable structure capable of supportingthe robot 100.

The linear guidance and actuation system 110 may comprise a linearguidance arrangement and a linear actuation arrangement configured tofacilitate traversing motion of the traversing platform 112 with respectto the stationary base 108 (for example, in the direction along theX-axis in FIG. 1A).

As indicated diagrammatically in the example of FIG. 1A, the linearguidance arrangement may be formed by a linear bearing arrangement. Asan example, the linear bearing arrangement may include one or morelinear bearing rails 124 attached to the stationary base 108 and one ormore linear bearing blocks 126 attached to the traversing platform 112.The linear guidance portion of the linear guidance and actuation system110 may include a shield system configured to prevent contact with thelinear bearing rails 124, prevent debris from contaminating the linearbearing blocks 126 (or other linear bearing(s)), and prevent particlesfrom migrating out of the linear bearing blocks 126 (or other linearbearing(s)).

Alternatively, the linear guidance arrangement may be a system of wheelsand rails, a cable or belt suspension system, a magnetic support system,or any other suitable arrangement configured to constrain the motion ofthe traversing platform 112 with respect to the stationary base 108.

As shown diagrammatically in the example of FIGS. 1C(1) and 1C(2), thelinear actuation arrangement may comprise one or more linear actuatorsand one or more position sensors 111. Although the position sensor 111is shown as being on the traversing platform 112, it should beunderstood that the position sensor 111 may be anywhere on or in thelinear guidance and actuation system 110. The linear actuator of thelinear actuation arrangement may comprise a stationary portion, whichmay be attached to the stationary base 108, and a movable portion, whichmay be attached to the traversing platform 112. For example, the linearactuator may be a linear motor 130, such as a permanent magnet motor.The movable portion may comprise a forcer with coils 132 (for example, amoving coil arrangement) on a bottom surface of the traversing platform112, and the stationary portion may be formed by a magnet track 134 onthe stationary base 108. In a moving magnet arrangement, the movableportion may comprise a magnet plate on the traversing platform 112, andthe stationary portion may be formed by a track formed of coils 132 onthe stationary base 108.

Alternatively, the linear actuation arrangement may be based on a beltdrive, band drive, cable drive, ball-screw, leadscrew, or any othersuitable arrangement capable of producing a force between the stationarybase 108 and the traversing platform 112 substantially in the directionof the desired traversing motion of the robot 100.

The position sensor 111 of the linear actuation arrangement may beconfigured to measure the position of the traversing platform 112 alongthe desired direction of traversing motion (direction along the X-axis).As an example, the position sensor 111 may be a position encoder, suchas an optical, magnetic, inductive or capacitive position encoder, alaser interferometer, or any other suitable device capable of measuringdirectly or indirectly (for example, in the case of a belt drive, banddrive, cable drive, ball-screw, or leadscrew) the position of thetraversing platform 112 along the desired direction of traversingmotion.

The measurements from the position sensor 111 may be utilized by thecontrol system 106 to control the linear actuator (for example, thelinear motor 130) in order to achieve the desired motion or stationaryposition of the traversing platform 112 with respect to the stationarybase 108 along the direction of the desired traversing motion of therobot 100 (direction along the X-axis).

The lift mechanism 114 may comprise one or more lift linkages 136configured to move the spindle platform 116 relative to the traversingplatform 112 in the vertical direction (or, more accurately, in a mannerthat includes a vertical motion component) and to stabilize the angularorientation of the spindle platform 116 with respect to the traversingplatform 112 (for example, to keep the spindle platform 116substantially leveled). For example, in accordance with FIGS. 1A, 1B(1),and 1C(1), the assembled lift linkages 136 may comprise a parallelogramarrangement actuated by a lift mechanism motor 140, which may be arotary drive. The rotary drive (or other lift mechanism motor 140) mayinclude a rotary motor and a rotary sensor. Control of movement of thespindle platform 116 (for example, to keep the spindle platform 116substantially leveled) may be carried out using the control system 106.

In general, each of the one or more lift linkages 136 of the liftmechanism 114 may comprise one or more links, joints (of a rotary typeor another suitable type), and/or pulley arrangements utilizing belts,bands, or cables. The one or more lift linkages 136 may be actuated byone or more rotary motors, linear motors, struts, or by any othersuitable actuation means.

As depicted in the example of FIGS. 1A, 1B(1), 1B(2), and 1C(1), the oneor more lift linkages 136 of the lift mechanism 114 may be arranged onone or both sides of the traversing platform 112. FIG. 1B(2) shows liftlinkages 136 on both sides of the traversing platform 112. As anotherexample, the one or more lift linkages 136 may be arranged on one orboth faces of the traversing platform 112. Alternatively, the one ormore lift linkages 136 may be arranged in any suitable location on thetraversing platform 112.

The spindle platform 116 may carry the robot arm 120 and one or moremotors configured to drive or actuate the robot arm 120 or a portion ofthe robot arm 120. As an example, as depicted diagrammatically in FIGS.1C(1), a first link 142 (upper arm) of the robot arm 120 may be coupledto the spindle platform 116 via a rotary joint, a stator 144 of a motor(motor T) may be attached to the spindle platform 116, and a rotor 146of the motor (motor T) may be attached to the first link 142 of therobot arm 120. The motor (motor T) may conveniently protrude to and/orextend into the first link 142 of the robot arm 120 and utilize thecombined thickness (height) of the spindle platform 116 and the firstlink 142 of the robot arm 120. Alternatively, the stator 144 of themotor (motor T) may be attached to the first link 142 of the robot arm120, and the rotor 146 of the motor (motor T) may be attached to thespindle platform 116. While motor T is shown in an internal-rotorconfiguration in FIG. 1C(1), motor T may be of an external-rotorconfiguration or of any suitable type.

Referring to the example of FIG. 1B(1), the robot arm 120 may comprisethe first link 142 (upper arm), two forearms (forearm A 150 and forearmB 152), and two wrist links (wrist link A 154 and wrist link B 156),each carrying one or more end-effectors 160, each of which may beconfigured to accept a payload. Each of the forearms 150, 152 may becoupled to the first link 142 via a rotary joint (elbow joint A 164 andelbow joint B 166). Two motors (motor A and motor B shown in FIG. 1C(1))may be attached to the first link 142, each coupled to one of the twoforearms 150, 152. Each of the wrist links 154, 156 may be coupled toone of the forearms 150, 152 via a rotary joint (wrist joint A 170 andwrist joint B 172). The robot arm 120 may further include two beltdrives, band drives (band drives A and B are shown in the forearms 150,152, respectively, in FIG. 1C(1)), or cable drives, each configured toconstrain the angular orientation of one of the wrist links 154, 156.The belt drives, band drives, or cable drives may employ circular and/ornon-circular pulleys, as described in U.S. Pat. Nos. 9,149,936,9,840,004, 9,889,557, and 10,224,232, which are hereby incorporated byreference in their entireties.

The traversing platform 112, spindle platform 116, and robot arm 120 mayinclude features configured to remove heat produced by the motors andother active components attached to them. As an example, the robot arm120 and the spindle platform 116 may include surface(s) (flat,cylindrical, or of any suitable shape) that may face each other andallow heat to be transferred from the robot arm 120 to the spindleplatform 116 via radiation and, if residual gases are present,conduction and convection mechanisms. Similarly, the traversing platform112 and spindle platform 116 may feature surfaces configured to extractheat out from the robot arm 120 using radiation and, if residual gasesare present, heat conduction and convection.

The control system 106 of the robot 100 may receive external inputs, forexample, from the user or a host system, read positions of individualmotion axes (motors) from position encoders (not shown for simplicity),and process the information to apply voltages to the motors to performthe desired motion and/or achieve the desired position.

In one example embodiment, as illustrated diagrammatically, for example,in FIG. 2A, the actuators (motors) in the robot 100 may be controlled bycontrol module(s) located conveniently in close proximity to therespective actuators. The actuator(s) (for example, motor T) located onthe spindle platform 116 may be controlled by a controller or controlsystem or control module(s) 200 attached to or located in the spindleplatform 116. The actuator(s) (for example, the lift mechanism motor140) of the lift mechanism 114 may be controlled by a controller orcontrol module(s) 210 located on or in the traversing platform 112. Theactuator(s) in the robot arm 120 may be controlled by a controller orcontrol module(s) 218 in the robot arm 120. The control modules 200,210, 218 may be coordinated, for instance, over a communication network212, by a master controller 220 which may be also located in thetraversing platform 112 and in communication with a host communicationsystem 228. The master controller 220 and the control module 210 of thelift mechanism 114 may be separate devices or they may be combined intoa single integrated device. Alternatively, as depicted diagrammaticallyin FIG. 2B, the master controller 220 may reside outside of thetraversing platform 112, stationary with respect to the stationary base108. In any configuration, the master controller 220 may comprise one ormore processors 222 and one or more memories 224 with code configured toperform operations as described herein.

In another example embodiment, encoder signals 238 and motor lines maybe brought to a centralized controller 240 located in the traversingplatform 112 or outside of the traversing platform 112 (stationary withrespect to the stationary base 108), as shown diagrammatically in FIGS.2C and 2D. Alternatively, any combination of the configurations of FIGS.2A to 2D may be used. The centralized controller 240 may comprise one ormore processors 242 and one or more memories 244 with code configured toperform operations as described herein.

In the examples of FIGS. 2C and 2D, motor S refers to the actuator ofthe linear actuation arrangement, and motor 2, refers to the actuator ofthe lift mechanism 114. The control modules are indicated at 200, 210,and 218.

The lift mechanism 114 and the robot arm 120 may include arrangements todeliver electrical power, transmit electrical signals, and circulatefluid (gas and/or liquid) within the robot 100. These arrangements maybe needed for the control system (power delivery and electrical signaltransmission) and to enhance heat removal (fluid circulation). Anexample arrangement that may facilitate power delivery, signaltransmission, and/or fluid circulation between components coupled by arotary joint is depicted diagrammatically in FIG. 3A at 300 and isreferred to as “arrangement 300.”

As shown in FIG. 3A, a bellows 304 may be utilized to connect internalvolumes of components coupled by a rotary joint 306 to provide a passage308 for one or more cables and/or one or more hoses. Shaped guides 310may be used to constrain the one or more cables and/or one or more hosesand prevent the one or more cables and/or one or more hoses from rubbingagainst the bellows 304 and other components.

In the example arrangement 300 of FIG. 3A, the internal volume of thebellows 304 may be at substantially the same pressure as the internalvolumes of the robot components that it connects, which may be higherthan the pressure of the external vacuum environment. Alternatively, foradded stability of the bellows 304, the arrangement can be reconfiguredso that the lower pressure environment is inside of the bellows 304, asshown diagrammatically in FIG. 3B. In FIG. 3B, the bellows 304 is shownin its compressed position.

Other example arrangements that may facilitate power delivery, signaltransmission, and/or fluid circulation through a rotary joint can befound in U.S. Pat. No. 10,569,430, which is hereby incorporated byreference in its entirety.

Additional arrangements may be used to transmit electrical power andcommunication signals between the stationary base and the traversingplatform 112 of the robot 100. For example, a service loop, an inductivecoupling, a capacitive coupling, an optical communication link, or aradiofrequency communication system may be employed for this purpose.

The robot 100 may traverse along the stationary base 108, elevate thespindle platform 116, rotate the robot arm 120, and extend each of theend-effectors of the robot arm 120, as illustrated diagrammatically inFIGS. 4A(1)-4A(3) and 4B(1)-4B(3). As an example, FIGS. 4A(1)-4A(3)depict the robot 100 in one position with respect to the stationary base108 with the spindle platform 116 lowered and both end-effectors 160retracted. As another example, FIGS. 4B(1)-4B(3) depict the robot 100 inanother position with respect to the stationary base 108 with thespindle platform 116 elevated and one end-effector 160 extended.

A distinctive feature of the example embodiment of FIG. 1A is that themotors and other components of the robot 100 may nest or overlapvertically, (share substantially the same vertical space (in particularwhen the spindle platform 116 is lowered and is in a collapsed position,as illustrated in FIGS. 5A and 5B)). As shown in FIG. 5A, portions ofthe motor T may protrude into the first link 142 of the robot arm 120even when the spindle platform 116 is collapsed relative to thetraversing platform 112 or when the robot arm 120 is retracted. Thisreduces the vertical space occupied by the robot 100 and, consequently,the depth and volume of the vacuum chamber where the robot 100 mayoperate. At least motor A or motor B may also nest with motor T in thecollapsed position to further reduce the vertical space occupied by therobot 100.

Alternative example embodiments of the traversing robot 100 according tothe present invention are depicted diagrammatically in FIGS. 6-8.

The lift mechanism 114 may include a counterbalancing feature, such as acounterweight or a spring (for example, a coil spring or a torsionspring) to reduce the torque or force on the actuator (motor) of thelift mechanism 114. An example embodiment with a counterbalancingfeature that utilizes a coil spring 600 in tension is depicteddiagrammatically in FIG. 6. Alternatively, any other suitablecounterbalancing feature may be used.

An example alternative lift mechanism is diagrammatically depicted inFIG. 7A and is hereinafter referred to as “lift mechanism 714.” The liftmechanism 714 may include a link 716, which may be coupled to thetraversing platform 112 and the spindle platform 116 by rotary joints720 and 722, respectively. The lift mechanism 714 may further include anactuator or motor 730 configured to drive a band 732 (or a belt orcable), the driving of which is configured to maintain the same angularorientation of the spindle platform 116 with respect to the traversingplatform 112, for example, to keep the spindle platform 116substantially leveled. In this arrangement, as shown, a first pulley 734may be attached to the traversing platform 112 and a second pulley 736may be attached to the spindle platform 116.

As indicated in FIG. 7A, the link 716 may be actuated by a rotary motorRM attached to the traversing platform 112. When the rotary motor RMactuates the link 716 to rotate with respect to the traversing platform112, the spindle platform 116 changes elevation with respect to thetraversing platform 112. Alternatively, the rotary motor RM may beattached to the spindle platform 116. As another alternative, a linearmotor, strut, or any other suitable actuation means may be used toactuate the link 716 of the lift mechanism 714.

Another example alternative lift mechanism is diagrammatically shown inFIG. 7B at 750. The lift mechanism 750 may include a linkage which maycomprise a first link 754 and a second link 756. The first link 754 maybe coupled to the traversing platform 112 by a first rotary joint 760,the second link 756 may be coupled to the first link 754 by a secondrotary joint 762, and the spindle platform 116 may be coupled to thesecond link 756 by yet a third rotary joint 764. The linkage of the liftmechanism 750 may further include two belt drives, band drives, or cabledrives configured to maintain the same angular orientation of thespindle platform 116 with respect to the traversing platform 112, forexample, to keep the spindle platform 116 substantially leveled.

As shown in FIG. 7B, the first belt drive, band drive, or cable drivemay be located inside of the first link 754, connecting a first pulley770 attached to the traversing platform 112 and a second pulley 772attached to the second link 756. The diameter of the first pulley 770attached to the traversing platform 112 may be twice the diameter of thesecond pulley 772 attached to the second link 756. The second beltdrive, band drive, or cable drive may be located inside of the secondlink 756, connecting the second pulley 772 to a third pulley 774 on thespindle platform 116. The diameter of the third pulley 774 may be abouttwice the diameter of the second pulley 772 and the same or similar tothe diameter of the first pulley 770.

Referring still to FIG. 7B, the first link 754 of the linkage of thelift mechanism 750 may be actuated by a rotary motor RM in or on thetraversing platform 112. In this arrangement, when the rotary motor RMactuates the first link 754 so that the first link 754 rotates withrespect to the traversing platform 112, the spindle platform 116 movesvertically with respect to the traversing platform 112. Alternatively, alinear motor, strut, or any other suitable actuation means may be usedto actuate the lift mechanism 750.

Although the example lift mechanism 750 of FIG. 7B is shown with twolinks of the same joint-to-joint length and with circular pulleys, thetwo links may be of unequal joint-to-joint lengths and some or all ofthe pulleys may be non-circular. Alternatively, any suitable number oflinks and pulley types may be used. Linkages defined by the first link754 and the second link 756 may be arranged on one or both sides of thetraversing platform 112 and connected to one or both sides of thespindle platform 116.

As another example, as shown diagrammatically in FIG. 7C, the linkage(s)defined by the first link 754 and the second link 756 of the liftmechanism 750 may be arranged on one or both faces of the traversingplatform 112 and connected to one or both faces of the spindle platform116 (as opposed to the sides of the spindle platform 116).Alternatively, the first link 754 and the second link 756 of the liftmechanism 750 may be arranged in any suitable location between thetraversing platform 112 and the spindle platform 116.

Referring now to FIGS. 7D(1) and 7D(2), a simplified cross-sectionalview of an example embodiment robot 700 having a robot arm 702 is shown.The example robot 700 may utilize one or more linear bearings and alinear actuation system. In the example robot 700, a spindle platform766 may be supported by one or more linear bearings 768 and a linearactuator (such as a forcer/coil arrangement on a rail or track systemsuch as rails 769, as in previous examples). The spindle platform 766may be actuated up and down, for example, by a suitable Z-axis mechanism26 (for example, a ball-screw drive, a leadscrew, band drive, beltdrive, cable drive, linear motor, or any other suitable means ofactuation). As shown, a bellows 776 may be utilized to contain thevacuum environment while allowing the spindle platform 766 to move upand down. The height of the robot 700 can be reduced as compared toother examples disclosed herein by relocating the motor M that actuatesthe upper arm 778 to the robot arm 702, as illustrated diagrammaticallyin FIG. 7E.

An example embodiment of a traversing robot according to the presentinvention with no lift mechanism is depicted diagrammatically in FIGS.7F(1) and 7F(2) and is hereinafter referred to as “robot 780.” Robot 780comprises a robot arm 782 mounted directly on a base 784, which utilizesone or more linear bearings 768 configured to slide along rails 769 (ortracks). Robot 780 also includes a linear actuation system as inprevious example embodiments.

A comparison of selected example embodiments with a robot reflecting thestate of the art is provided in FIGS. 7G(1), 7G(2), 7G(3), and 7G(4).FIG. 7G(1) shows a simplified cross-sectional view of the robot 10reflecting the state of the art; FIG. 7G(2) depicts an exampleembodiment of a traversing robot 800 with two motors M relocated to arobot arm 802; FIG. 7G(3) illustrates another example embodiment with alinkage-based lift mechanism, for example, robot 100; and FIG. 7G(4)shows an example embodiment with no lift mechanism, for example, robot780.

Although a single spindle platform supported by a single lift mechanismis shown as part of the above example embodiments, any number of spindleplatforms and lift mechanisms, including no lift mechanism, may be used.

An example alternative robot is diagrammatically depicted in FIG. 8 at1000 and is hereinafter referred to as “robot 1000.” The robot 1000 maybe supported by a stationary base 108 and may comprise a linear guidanceand actuation system 110, a traversing platform 112, a lift mechanism114, a spindle platform 116, and the control system 106 as in previousexamples. An arm 1012 is mounted on the spindle platform 116, the arm1012 having an upper arm 1014 and two forearms 1016, each carrying anend-effector, the forearms 1016 being coupled to the upper arm 1014 viaa coaxial rotary joint (referred to as the elbow joint 1020). The upperarm 1014 may house two motors (motor A and motor B), each configured toactuate one of the two forearms 1016. Although FIG. 8 shows motors A andB in a configuration with external rotors, motors A and B may be of aninternal-rotor configuration. Alternatively, any suitable motorconfiguration, type, and design may be used.

It should be noted that the bearings, bearing arrangements, and bearinglocations shown in the diagrams described herein are intended forillustration only—the purpose is to communicate how individualcomponents may generally be constrained with respect to each other. Anysuitable bearings, bearing arrangements, and bearing locations may beused.

Although a communication network is described as the means ofcommunication between the various components of the control system, anyother suitable means of communication between the master controller andthe control modules, such as a wireless network or a point-to-point bus,may be utilized.

Features as described herein may be used with features as described inpending U.S. patent application Ser. Nos. 16/788,993, 16/788,973, and15/294,099 which are hereby incorporated by reference in theirentireties.

In one example embodiment, an apparatus comprises a spindle platform; atraversing platform configured to move in a first direction; a liftsystem connected to the spindle platform and the traversing platform,the lift system being configured to move the spindle platform in asecond direction between a collapsed position and an extended position,the second direction being perpendicular to the first direction; atleast one movable arm connected to the spindle platform, the at leastone movable arm comprising a first link connected to the spindleplatform, a second link connected to the first link, and a third linkconnected to the second link, and at least one first actuator connectedto the spindle platform and being configured to cause a rotation of thefirst link, and at least one second actuator in the at least one movablearm and being configured to cause a rotation of the second link. Thefirst actuator extends from the spindle platform into the first link tooccupy a combined thickness of the spindle platform and the first link.

The at least one first actuator and the at least one second actuator maybe configured to overlap in a vertical direction. The first actuator maybe configured to nest with the second actuator. The apparatus mayfurther comprise a linear guidance system on the traversing platform,the linear guidance system being configured to constrain a motion of thetraversing platform in a linear direction. The linear guidance systemmay comprise at least one linear bearing on the traversing platform, theat least one linear bearing being configured to engage and slide on arail. The apparatus may further comprise a linear actuation system onthe traversing platform, the linear actuation system being configured tomove the traversing platform in a linear direction. The linear actuationsystem may comprise a linear actuator and at least one position sensor.The linear actuator may comprise a permanent magnet motor having atleast one coil, the at least one coil being configured to magneticallyengage a track. The at least one position sensor may be located on thetraversing platform and may be configured to be controlled along thelinear direction using a control. The lift system may comprise at leastone linkage extending between and rotatable relative to the traversingplatform and the spindle platform. The at least one linkage may berotatable on the traversing platform using a rotary actuator. The rotaryactuator may be controllable using a control to maintain the spindleplatform in a substantially leveled position relative to the traversingplatform. The lift system may further comprise a counterbalancingspring.

In another example embodiment, a method comprises providing a traversingplatform configured to move in a first direction; providing a spindleplatform; providing a lift system connected to the spindle platform andthe traversing platform, the lift system being configured to move thespindle platform in a second direction between a collapsed position andan extended position, the second direction being perpendicular to thefirst direction; and providing at least one movable arm connected to thespindle platform, the at least one movable arm comprising a first linkconnected to the spindle platform, a second link connected to the firstlink, and a third link connected to the second link; providing at leastone first actuator connected to the spindle platform and beingconfigured to cause a rotation of the first link, and providing at leastone second actuator in the at least one movable arm and being configuredto cause a rotation of the second link. The first actuator extends fromthe spindle platform into the first link to occupy a combined thicknessof the spindle platform and the first link.

The at least one first actuator and the at least one second actuator maybe configured to overlap in a vertical direction. The method may furthercomprise providing a linear guidance system on the traversing platform,the linear guidance system being configured to constrain a motion of thetraversing platform in a linear direction. The method may furthercomprise providing a linear actuation system on the traversing platform,the linear actuation system being configured to move the traversingplatform in a linear direction. The method may further comprise using aposition sensor and a control to control a movement of the traversingplatform in the first direction. The method may further comprise using acontrol to control a movement of the spindle platform in the seconddirection.

In another example embodiment, an apparatus comprises at least oneprocessor; and at least one non-transitory memory including computerprogram code, the at least one memory and the computer program codeconfigured to, with the at least one processor, cause the apparatus atleast to perform: moving a traversing platform in a first direction;operating a lift system connected to the traversing platform and to aspindle platform to move the spindle platform in a second directionbetween a collapsed position and an extended position, the seconddirection being perpendicular to the first direction; operating at leastone movable arm connected to the spindle platform, the at least onemovable arm comprising a first link connected to the spindle platform, asecond link connected to the first link, and a third link connected tothe second link; and operating at least one first actuator meansconnected to the spindle platform and being configured to cause arotation of the first link, and at least one second actuator means inthe at least one movable arm and being configured to cause a rotation ofthe second link. The first actuator means extends from the spindleplatform into the first link to occupy a combined thickness of thespindle platform and the first link.

The apparatus may be further caused to nest the first actuator meanswith the second actuator means. Moving the traversing platform in thefirst direction may comprise using a linear drive system to move thetraversing platform along a rail. Using a linear drive system to movethe traversing platform along the rail may comprise operating apermanent magnet motor having a coil arrangement along a magnet track.The apparatus may further comprise using the at least one processor andthe at least one non-transitory memory with a position sensor on thetraversing platform to sense a position of the traversing platform. Theapparatus may further comprise using the at least one processor and theat least one non-transitory memory with the lift system to level thespindle platform relative to the traversing platform.

In another example embodiment, an apparatus comprises a traversingplatform configured to move in a first direction; a spindle platformhaving a first actuator and a first control connected to the firstactuator; at least one movable arm connected to the spindle platform,the at least one movable arm comprising a first link connected to thefirst actuator and at least one second link connected to the first link,the second link comprising at least one second actuator and controlledby a second control on the at least one movable arm, the at least onefirst actuator being configured to cause a rotation of the first linkand the at least one second actuator being configured to cause arotation of the second link; a lift system connected to the spindleplatform and the traversing platform, the lift system being configuredto move the spindle platform in a second direction between a collapsedposition and an extended position, the second direction beingperpendicular to the first direction, the lift system having a thirdactuator on the traversing platform and a third control connected to thethird actuator. The first actuator extends from the spindle platforminto the first link to occupy a combined thickness of the spindleplatform and the first link.

The first actuator may nest with the at least one second actuator. Thefirst control, the second control, and the third control may becoordinated over a communication network by a master control. The mastercontrol may be located on the traversing platform. The master controlmay be located external to the traversing platform. The traversingplatform may be configured to move in the first direction along a systemof linear bearings and rails. The apparatus may further comprise asystem of magnets and coils configured to move the traversing platformin the first direction.

It should be understood that the foregoing description is onlyillustrative. Various alternatives and modifications can be devised bythose skilled in the art. For example, features from differentembodiments described above could be selectively combined into a newembodiment. Accordingly, the description is intended to embrace all suchalternatives, modifications, and variances which fall within the scopeof the appended claims.

What is claimed is:
 1. An apparatus, comprising: a spindle platform; atraversing platform configured to move in a first direction; a liftsystem connected to the spindle platform and the traversing platform,the lift system being configured to move the spindle platform in asecond direction between a collapsed position and an extended position,the second direction being perpendicular to the first direction; atleast one movable arm connected to the spindle platform, the at leastone movable arm comprising a first link connected to the spindleplatform, a second link connected to the first link, and a third linkconnected to the second link, and at least one first actuator connectedto the spindle platform and being configured to cause a rotation of thefirst link, and at least one second actuator in the at least one movablearm and being configured to cause a rotation of the second link; whereinthe first actuator extends from the spindle platform into the first linkto occupy a combined thickness of the spindle platform and the firstlink.
 2. The apparatus of claim 1, wherein the at least one firstactuator and the at least one second actuator are configured to overlapin a vertical direction.
 3. The apparatus of claim 1, wherein the firstactuator is configured to nest with the second actuator.
 4. Theapparatus of claim 1, further comprising a linear guidance system on thetraversing platform, the linear guidance system being configured toconstrain a motion of the traversing platform in a linear direction. 5.The apparatus of claim 4, wherein the linear guidance system comprisesat least one linear bearing on the traversing platform, the at least onelinear bearing being configured to engage and slide on a rail.
 6. Theapparatus of claim 1, further comprising a linear actuation system onthe traversing platform, the linear actuation system being configured tomove the traversing platform in a linear direction.
 7. The apparatus ofclaim 6, wherein the linear actuation system comprises a linear actuatorand at least one position sensor.
 8. The apparatus of claim 7, whereinthe linear actuator comprises a permanent magnet motor having at leastone coil, the at least one coil being configured to magnetically engagea track.
 9. The apparatus of claim 7, wherein the at least one positionsensor is located on the traversing platform and is configured to becontrolled along the linear direction using a control.
 10. The apparatusof claim 1, wherein the lift system comprises at least one linkageextending between and rotatable relative to the traversing platform andthe spindle platform.
 11. The apparatus of claim 10, wherein the atleast one linkage is rotatable on the traversing platform using a rotaryactuator.
 12. The apparatus of claim 11, wherein the rotary actuator iscontrollable using a control to maintain the spindle platform in asubstantially leveled position relative to the traversing platform. 13.The apparatus of claim 1, wherein the lift system further comprises acounterbalancing spring.
 14. A method, comprising: providing atraversing platform configured to move in a first direction; providing aspindle platform; providing a lift system connected to the spindleplatform and the traversing platform, the lift system being configuredto move the spindle platform in a second direction between a collapsedposition and an extended position, the second direction beingperpendicular to the first direction; and providing at least one movablearm connected to the spindle platform, the at least one movable armcomprising a first link connected to the spindle platform, a second linkconnected to the first link, and a third link connected to the secondlink, and providing at least one first actuator connected to the spindleplatform and being configured to cause a rotation of the first link, andproviding at least one second actuator in the at least one movable armand being configured to cause a rotation of the second link; wherein thefirst actuator extends from the spindle platform into the first link tooccupy a combined thickness of the spindle platform and the first link.15. The method of claim 14, wherein the at least one first actuator andthe at least one second actuator are configured to overlap in a verticaldirection.
 16. The method of claim 14, further comprising providing alinear guidance system on the traversing platform, the linear guidancesystem being configured to constrain a motion of the traversing platformin a linear direction.
 17. The method of claim 14, further comprisingproviding a linear actuation system on the traversing platform, thelinear actuation system being configured to move the traversing platformin a linear direction.
 18. The method of claim 14, further comprisingusing a position sensor and a control to control a movement of thetraversing platform in the first direction.
 19. The method of claim 14,further comprising using a control to control a movement of the spindleplatform in the second direction.
 20. An apparatus comprising: at leastone processor; and at least one non-transitory memory including computerprogram code, the at least one memory and the computer program codeconfigured to, with the at least one processor, cause the apparatus atleast to perform: moving a traversing platform in a first direction;operating a lift system connected to the traversing platform and to aspindle platform to move the spindle platform in a second directionbetween a collapsed position and an extended position, the seconddirection being perpendicular to the first direction; operating at leastone movable arm connected to the spindle platform, the at least onemovable arm comprising a first link connected to the spindle platform, asecond link connected to the first link, and a third link connected tothe second link; and operating at least one first actuator meansconnected to the spindle platform and being configured to cause arotation of the first link, and at least one second actuator means inthe at least one movable arm and being configured to cause a rotation ofthe second link; wherein the first actuator means extends from thespindle platform into the first link to occupy a combined thickness ofthe spindle platform and the first link.
 21. The apparatus of claim 20,wherein the apparatus is further caused to nest the first actuator meanswith the second actuator means.
 22. The apparatus of claim 20, whereinmoving the traversing platform in the first direction comprises using alinear drive system to move the traversing platform along a rail. 23.The apparatus of claim 22, wherein using a linear drive system to movethe traversing platform along the rail comprises operating a permanentmagnet motor having a coil arrangement along a magnet track.
 24. Theapparatus of claim 20, further comprising using the at least oneprocessor and the at least one non-transitory memory with a positionsensor on the traversing platform to sense a position of the traversingplatform.
 25. The apparatus of claim 20, further comprising using the atleast one processor and the at least one non-transitory memory with thelift system to level the spindle platform relative to the traversingplatform.
 26. An apparatus, comprising: a traversing platform configuredto move in a first direction; a spindle platform having a first actuatorand a first control connected to the first actuator; at least onemovable arm connected to the spindle platform, the at least one movablearm comprising a first link connected to the first actuator and at leastone second link connected to the first link, the second link comprisingat least one second actuator and controlled by a second control on theat least one movable arm, the at least one first actuator beingconfigured to cause a rotation of the first link and the at least onesecond actuator being configured to cause a rotation of the second link;and a lift system connected to the spindle platform and the traversingplatform, the lift system being configured to move the spindle platformin a second direction between a collapsed position and an extendedposition, the second direction being perpendicular to the firstdirection, the lift system having a third actuator on the traversingplatform and a third control connected to the third actuator; whereinthe first actuator extends from the spindle platform into the first linkto occupy a combined thickness of the spindle platform and the firstlink.
 27. The apparatus of claim 26, wherein the first actuator nestswith the at least one second actuator.
 28. The apparatus of claim 26,wherein the first control, the second control, and the third control arecoordinated over a communication network by a master control.
 29. Theapparatus of claim 28, wherein the master control is located on thetraversing platform.
 30. The apparatus of claim 28, wherein the mastercontrol is located external to the traversing platform.
 31. Theapparatus of claim 26, wherein the traversing platform is configured tomove in the first direction along a system of linear bearings and rails.32. The apparatus of claim 31, further comprising a system of magnetsand coils configured to move the traversing platform in the firstdirection.